The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 03, 2023
Filed:
Mar. 20, 2019
Edwards Japan Limited, Chiba, JP;
Edwards Japan Limited, Chiba, JP;
Abstract
A vacuum pump capable of suppressing the solidification of gas in a normal operation of a pump is provided. Provided is a vacuum pump including a casing that has an inlet port for sucking gas from outside and an outlet port for exhausting the gas to the outside; a turbo-molecular-pump mechanism that is disposed in the casing and includes rotor blades and stator blades alternately arranged in multiple stages in an axial direction; a thread-groove-pump mechanism that is disposed in the casing and is connectedly disposed on an exhaust side of the turbo-molecular-pump mechanism; first temperature regulating means that is configured to regulate cooling of the turbo-molecular-pump mechanism; and second temperature regulating means that is configured to regulate heating of the thread-groove-pump mechanism.