The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 03, 2023
Filed:
Jul. 01, 2019
Applicant:
Viavi Solutions Inc., San Jose, CA (US);
Inventors:
Markus K. Tilsch, Santa Rosa, CA (US);
Benjamin F. Catching, Santa Rosa, CA (US);
Assignee:
VIAVI Solutions Inc., Chandler, AZ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/54 (2006.01); G01B 11/06 (2006.01); B05C 11/10 (2006.01); G01N 21/84 (2006.01); C23C 14/50 (2006.01);
U.S. Cl.
CPC ...
C23C 14/547 (2013.01); B05C 11/1005 (2013.01); B05C 11/1007 (2013.01); C23C 14/505 (2013.01); G01B 11/0625 (2013.01); G01B 11/0641 (2013.01); G01B 11/0683 (2013.01); G01B 11/0691 (2013.01); G01N 21/8422 (2013.01); G01B 2210/58 (2013.01);
Abstract
A coating system may include a coating chamber; a substrate holder to move a substrate along a motion path; and a sensor device in the coating chamber, wherein the sensor device is configured to move along the motion path, and wherein the sensor device is to perform a spectral measurement on the substrate.