The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 03, 2023

Filed:

Dec. 18, 2019
Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventors:

Amir Tavakkoli Kermani Ghariehali, Austin, TX (US);

Edward Brian Fletcher, Austin, TX (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B29C 33/42 (2006.01); B29C 39/26 (2006.01); B29C 59/02 (2006.01); H01L 21/67 (2006.01); G03F 7/00 (2006.01); H01L 21/311 (2006.01); B32B 37/14 (2006.01);
U.S. Cl.
CPC ...
B29C 33/424 (2013.01); B29C 39/26 (2013.01); B29C 59/02 (2013.01); B32B 37/14 (2013.01); G03F 7/0002 (2013.01); H01L 21/31138 (2013.01); H01L 21/67063 (2013.01);
Abstract

A template and method of using the template is disclosed. The template can include a body with a first side and a second side, and an extension. The extension can include a first surface adjacent the body, a second surface, and a third surface between the first surface and the second surface, where the first surface includes a curvature and where a portion of the curvature of the first surface is interior to the third surface. The method can include dispensing a formable material over a substrate, where the substrate includes a non-uniform surface topography. The method can also include curing the formable material contacting the second surface of the extension to form a layer over the substrate while the formable material contacting the third surface of the extension remains in a liquid state, wherein curing is performed while the template is contacting the formable material.


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