The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 03, 2023
Filed:
Jun. 28, 2019
Samsung Electronics Co., Ltd., Suwon-si, KR;
Fns Tech Co., Ltd., Cheonan-si, KR;
Bong Su Ahn, Hwaseong-si, KR;
Pal Kon Kim, Cheonan-si, KR;
Young Jun Yoo, Cheonan-si, KR;
Si Hyeong Kim, Hwaseong-si, KR;
Yoon Ho Kim, Hwaseong-si, KR;
Jin Ok Moon, Hwaseong-si, KR;
Seung Taek Oh, Cheonan-si, KR;
Abstract
A recycled polishing pad includes an upper layer pad and a supplementary pad. The upper layer pad includes a first surface and a second surface opposite to the first surface. The first surface has a plurality of first grooves and the second surface has a plurality of second grooves. The upper layer pad further includes a connecting body connecting the first grooves and the second grooves. The supplementary pad is in contact with the second surface of the upper layer pad. A depth of each of the first grooves is less than a depth of each of the second grooves.