The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 03, 2023

Filed:

Aug. 21, 2019
Applicant:

Fujifilm Electronic Materials U.s.a., Inc., North Kingstown, RI (US);

Inventors:

Marcia Cole-Yocom, Scottsdale, AZ (US);

Bryan Hinzie, Gilbert, AZ (US);

Michael Barker, Goodyear, AZ (US);

Jack Helzer, Chandler, AZ (US);

Shen-Ping Huang, HsinChu County, TW;

Pejman Ahmadiannamini, Gilbert, AZ (US);

Yuan Chen, Chandler, AZ (US);

Assignee:

FUJIFILM Electronic Materials U.S.A., Inc., North Kingstown, RI (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01D 65/02 (2006.01); B01D 61/02 (2006.01); H01L 21/67 (2006.01); B01D 71/36 (2006.01);
U.S. Cl.
CPC ...
B01D 65/02 (2013.01); B01D 61/026 (2022.08); B01D 61/027 (2013.01); B01D 71/36 (2013.01); H01L 21/67017 (2013.01); B01D 2311/02 (2013.01);
Abstract

A method for process a chemical liquid is provided. The method includes at least providing a system having at least one filtration medium, treatment the system with a treatment liquid having a content of iron (Fe) and calcium (Ca) of about 10 ppb or less, and processing a chemical liquid using an apparatus having the system configured therein after the treatment process.


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