The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 03, 2023
Filed:
May. 27, 2020
Fujifilm Electronic Materials Taiwan Co., Ltd., Hsin-Chu County, TW;
Kenichi Tanaka, HsinChu County, TW;
Cheng-Chieh Fan, HsinChu County, TW;
Shen-Ping Huang, HsinChu County, TW;
FUJIFILM Electronic Materials Taiwan Co., Ltd., Hsin-Chu County, TW;
Abstract
A chemical liquid purification apparatus includes a tank body, a return tube, a liquid sending pump, a filtration device and a piping. The tank body has a liquid passage port and a circulation port communicated to a storage space inside the tank body. The return tube has one end connected to the circulation port and another end extending to the storage space. The liquid sending pump and the filtration device are located outside the tank body in between the liquid passage port and the circulation port. The piping is connecting the liquid sending pump and the filtration device to the liquid passage port and the circulation port.