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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11539345 B1

PDFFull Text
Date of Patent:
Dec. 27, 2022

Filed:

Jun. 21, 2018

Surface acoustic wave device and method for manufacturing the same

Applicant:

Ndk Saw Devices Co., Ltd., Hokkaido, JP;

Inventor:

Atsushi Kamijo, Saitama, JP;

Assignee:

NDK SAW Devices Co., Ltd., Hokkaido, JP;

Attorney:

JCIPRNET

Primary Examiner:

Derek J Rosenau

Int. Cl.
CPC ...
H03H 9/145 (2006.01); H03H 9/25 (2006.01); H01L 41/047 (2006.01); H03H 3/08 (2006.01); H03H 9/02 (2006.01); C23C 14/18 (2006.01); C30B 29/02 (2006.01); C30B 23/02 (2006.01); C23C 14/35 (2006.01); C30B 29/30 (2006.01); C23C 14/54 (2006.01); H03H 9/64 (2006.01); H01L 41/29 (2013.01);
U.S. Cl.
CPC ...
H03H 9/14541 (2013.01); C23C 14/185 (2013.01); C23C 14/35 (2013.01); C23C 14/542 (2013.01); C30B 23/025 (2013.01); C30B 29/02 (2013.01); C30B 29/30 (2013.01); H03H 3/08 (2013.01); H03H 9/02559 (2013.01); H03H 9/25 (2013.01); H01L 41/0477 (2013.01); H01L 41/29 (2013.01); H03H 9/6483 (2013.01);
Abstract

A surface acoustic wave device includes a piezoelectric single crystal substrate and an electrode. The piezoelectric single crystal substrate is made of LiTaOor LiNbO. The electrode includes a titanium film formed on the piezoelectric single crystal substrate and an aluminum film or a film containing aluminum as a main component. The aluminum film or the film is formed on the titanium film. The aluminum film or the film containing aluminum as the main component is a twin crystal film or a single crystal film, the aluminum film or the film has a (111) plane that is non-parallel to a surface of the piezoelectric single crystal substrate with an angle θ, and the aluminum film or the film has a [−1, 1, 0] direction parallel to an X-direction of a crystallographic axis of the piezoelectric single crystal substrate.

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