The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 27, 2022
Filed:
Jun. 25, 2020
Applicant:
Seiko Epson Corporation, Tokyo, JP;
Inventors:
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/083 (2006.01); H01L 41/09 (2006.01); H01L 41/18 (2006.01); H01L 41/257 (2013.01); H03H 9/13 (2006.01); H03H 9/21 (2006.01); H03H 9/125 (2006.01); H03H 9/24 (2006.01);
U.S. Cl.
CPC ...
H01L 41/18 (2013.01); H01L 41/083 (2013.01); H01L 41/09 (2013.01); H01L 41/094 (2013.01); H01L 41/257 (2013.01); H03H 9/125 (2013.01); H03H 9/131 (2013.01); H03H 9/21 (2013.01); H03H 9/2489 (2013.01);
Abstract
A vibration element includes: a base; a first arm continuous with the base; a second arm that is continuous with the base and is adjacent to the first arm; a first electrode disposed on the first arm, the second arm, and the base; a first piezoelectric layer that has a first polarity and that is disposed on the first electrode on the first arm; a second piezoelectric layer that has a second polarity different from the first polarity and that is disposed on the first electrode on the second arm; an insulating layer disposed on the first electrode on the base; and a second electrode disposed on the first piezoelectric layer, the second piezoelectric layer, and the insulating layer.