The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 27, 2022

Filed:

May. 05, 2021
Applicant:

Powerchip Semiconductor Manufacturing Corporation, Hsinchu, TW;

Inventors:

Ching-Sung Ho, Hsinchu, TW;

Jia-Horng Tsai, Taipei, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/20 (2006.01); H01L 27/108 (2006.01); H01L 49/02 (2006.01);
U.S. Cl.
CPC ...
H01L 28/84 (2013.01); H01L 27/10814 (2013.01); H01L 27/10852 (2013.01);
Abstract

A semiconductor device including a substrate and a capacitor is provided. The capacitor includes a first electrode, a second electrode, and an insulating layer. The first electrode is located on the substrate. The first electrode has a plurality of hemispherical recesses. The second electrode is located on the first electrode. The insulating layer is located between the first electrode and the second electrode. Surfaces of the hemispherical recesses are in direct contact with the insulating layer.


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