The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 27, 2022
Filed:
May. 21, 2020
System apparatus and method for enhancing electrical clamping of substrates using photo-illumination
Applied Materials, Inc., Santa Clara, CA (US);
Qin Chen, Santa Clara, CA (US);
Julian G. Blake, Gloucester, MA (US);
Michael W. Osborne, Clinton, MA (US);
Steven M. Anella, West Newbury, MA (US);
Jonathan D. Fischer, Lynn, MA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
An apparatus may include a clamp to clamp a substrate wherein the clamp is arranged opposing a back side of the substrate; and an illumination system, disposed to direct radiation to the substrate, when the substrate is disposed on the clamp, wherein the radiation comprises a radiation energy, equal to or above a threshold energy to generate mobile charge in the substrate, where the illumination system is disposed to direct radiation to the back side of the substrate.