The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 27, 2022

Filed:

May. 21, 2020
Applicant:

Reno Technologies, Inc., Wilmington, DE (US);

Inventor:

Michael Gilliam Ulrich, Delran, NJ (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 7/40 (2006.01); H01J 37/32 (2006.01); H01L 21/66 (2006.01); C23C 16/50 (2006.01); H03H 7/38 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32183 (2013.01); C23C 16/50 (2013.01); H01J 37/3299 (2013.01); H01J 37/32935 (2013.01); H01L 22/14 (2013.01); H01L 22/20 (2013.01); H01L 22/26 (2013.01); H03H 7/38 (2013.01); H03H 7/40 (2013.01); H01J 2237/24495 (2013.01); H01J 2237/24564 (2013.01);
Abstract

In one embodiment, the present disclosure is directed to a method for impedance matching. A matching network includes first and second reactance elements configured to provide variable positions. A first parameter of the matching network is determined based on a detected value. The method determines first two-port parameters from a first one-dimensional array that corresponds to a first portion of the matching network using the first reactance element position, and second two-port parameters from a second one-dimensional array that corresponds to a second portion of the matching network using the second reactance element position. An output parameter is calculated based on the first parameter, the first two-port parameters, and the second two-port parameters. New first and second reactance element positions are determined from a match position table using the calculated output parameter. The method then alters the reactance elements accordingly to reduce a reflected power.


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