The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 27, 2022
Filed:
Oct. 18, 2019
Hitachi High-tech Corporation, Tokyo, JP;
Riken, Wako, JP;
Hitachi High-Tech Corporation, Tokyo, JP;
RIKEN, Wako, JP;
Abstract
An alignment system that realizes high reproducibility of position information during re-observation and in which a user can efficiently and easily re-observe an area of interest is provided. An alignment system that enables correlative observation between the imaging deviceand the charged particle beam device, in which a plurality of positional alignment points are set on a sample carrier in a state where a sample is placed on the sample carrier, the alignment controllerobtains a transformation matrix that transforms a coordinate system of the imaging device and a coordinate system of the charged particle beam device based on position information and magnification of each of the plurality of positional alignment points when a first image is imaged by an imaging device and position information and magnification of each of a plurality of positional alignment points when observing by a charged particle beam device, and transforms a field of view designated for the first image into field-of-view information of the charged particle beam device by using the transformation matrix.