The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 27, 2022

Filed:

Dec. 13, 2019
Applicants:

Hefei Xinsheng Optoelectronics Technology Co., Ltd., Anhui, CN;

Boe Technology Group Co., Ltd., Beijing, CN;

Inventors:

Leilei Cheng, Beijing, CN;

Jingang Fang, Beijing, CN;

Luke Ding, Beijing, CN;

Jun Liu, Beijing, CN;

Wei Li, Beijing, CN;

Bin Zhou, Beijing, CN;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02F 1/1333 (2006.01); G02F 1/1362 (2006.01); H01L 21/768 (2006.01); H01L 23/532 (2006.01); H01L 27/12 (2006.01);
U.S. Cl.
CPC ...
G02F 1/136227 (2013.01); H01L 21/76804 (2013.01); H01L 23/5329 (2013.01); H01L 27/124 (2013.01); H01L 27/1248 (2013.01); G02F 1/133345 (2013.01);
Abstract

A method of manufacturing an array substrate is provided, which comprises: forming a first metal layer and an insulating layer in sequence on a base substrate, the insulating layer covering the first metal layer; forming an etch barrier layer on the insulating layer; etching the etching barrier layer and the insulating layer multiple times, wherein an effective blocking area of the etching barrier layer decreases successively in each etching to form a connection hole penetrating the insulating layer, the connection hole includes a plurality of via holes connected in sequence, and a slope angle of a hole wall of each via hole is smaller than a preset slope angle; and forming a second metal layer, the second metal layer being connected to the first metal layer through the connection hole.


Find Patent Forward Citations

Loading…