The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 27, 2022

Filed:

Dec. 19, 2018
Applicant:

Texas Instruments Incorporated, Dallas, TX (US);

Inventors:

Robert F. Payne, Lucas, TX (US);

Molly Nelis Sing, Murphy, TX (US);

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G02B 26/00 (2006.01); G02B 26/08 (2006.01); G01B 7/30 (2006.01); H03K 21/38 (2006.01); G09G 3/34 (2006.01); G11C 11/413 (2006.01); G11C 11/41 (2006.01);
U.S. Cl.
CPC ...
G02B 26/0841 (2013.01); G01B 7/30 (2013.01); G09G 3/346 (2013.01); G11C 11/41 (2013.01); G11C 11/413 (2013.01); H03K 21/38 (2013.01); B81B 2201/042 (2013.01); G09G 2300/0847 (2013.01);
Abstract

A digital micromirror device includes a plurality of micromirror cells on a semiconductor die. Each respective cell includes a memory circuit and an electrode selection circuit. At least some of the micromirror cells include a micromirror and each respective memory circuit controls a micromirror tilt angle. For a given memory circuit controlled to a first tilt angle, a measurement circuit measures a first value indicative of a capacitance between a first electrode and the micromirror and measures a second value indicative of a capacitance on the second electrode. For a second micromirror tilt angle, the measurement circuit measures a third value indicative of a capacitance between the first electrode and the micromirror and measures a fourth value indicative of a capacitance on the second electrode. The measurement circuit generates a signal indicative of whether the micromirror is stuck at a particular angle or missing.


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