The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 27, 2022

Filed:

Sep. 24, 2020
Applicant:

Infineon Technologies Americas Corp., El Segundo, CA (US);

Inventors:

Mihir Tungare, Roseville, MN (US);

Peter Kim, Stillwater, MN (US);

Jianwei Wan, Woodbury, MN (US);

Chankyung Choi, Woodbury, MN (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 25/12 (2006.01); C30B 25/18 (2006.01); C30B 29/40 (2006.01); C30B 29/06 (2006.01); C23C 16/30 (2006.01); C23C 16/458 (2006.01); H01L 21/02 (2006.01); H01L 21/683 (2006.01); H01L 21/687 (2006.01); H01L 23/544 (2006.01); C30B 25/02 (2006.01);
U.S. Cl.
CPC ...
C30B 25/12 (2013.01); C23C 16/303 (2013.01); C23C 16/4584 (2013.01); C30B 25/18 (2013.01); C30B 29/06 (2013.01); C30B 29/403 (2013.01); H01L 21/0242 (2013.01); H01L 21/0254 (2013.01); H01L 21/02378 (2013.01); H01L 21/02381 (2013.01); H01L 21/6835 (2013.01); H01L 21/68721 (2013.01); H01L 21/68728 (2013.01); C30B 25/02 (2013.01); H01L 23/544 (2013.01); H01L 2221/68309 (2013.01); H01L 2223/54493 (2013.01);
Abstract

A wafer carrier includes a pocket sized and shaped to accommodate a wafer, the pocket having a base and a substantially circular perimeter, and a removable orientation marker, the removable orientation marker comprising an outer surface and an inner surface, the outer surface having an arcuate form sized and shaped to mate with the substantially circular perimeter of the pocket, and the inner surface comprising a flat face, wherein the removable orientation marker further comprises a notch at a first end of the flat face.


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