The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 27, 2022

Filed:

Jun. 17, 2020
Applicant:

Eastman Kodak Company, Rochester, NY (US);

Inventors:

Todd Mathew Spath, Hilton, NY (US);

Carolyn Rae Ellinger, Rochester, NY (US);

Assignee:

EASTMAN KODAK COMPANY, Rochester, NY (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/455 (2006.01); C23C 16/54 (2006.01); C23C 16/458 (2006.01); C23C 16/44 (2006.01); C23C 16/40 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45544 (2013.01); C23C 16/403 (2013.01); C23C 16/407 (2013.01); C23C 16/4412 (2013.01); C23C 16/4583 (2013.01); C23C 16/45519 (2013.01); C23C 16/45527 (2013.01); C23C 16/45551 (2013.01); C23C 16/45574 (2013.01); C23C 16/45595 (2013.01); C23C 16/545 (2013.01);
Abstract

A thin film deposition system includes a vacuum-preloaded gas bearing deposition head positioned in an external environment having an ambient pressure, the deposition head having an output face including a plurality of source openings through which gaseous materials are supplied and one or more exhaust openings. An exhaust pressure at the exhaust openings is less than ambient pressure, and a source pressure at the source openings is greater than that at the exhaust openings, with the pressure at the outermost source openings being greater than ambient pressure. A motion control system moves a substrate unit over the output face in the in-track direction without constraining its motion in a direction normal to the output face to a point where a center of gravity of the substrate unit is beyond the first edge of the output face.


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