The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 27, 2022

Filed:

Apr. 15, 2020
Applicant:

Government of the United States, As Represented BY the Secretary of the Air Force, Wright-Patterson AFB, OH (US);

Inventors:

Lavern A Starman, Dayton, OH (US);

John P K Walton, Troy, OH (US);

David Torres Reyes, Springboro, OH (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G02B 26/08 (2006.01); B81C 1/00 (2006.01); B81B 3/00 (2006.01);
U.S. Cl.
CPC ...
B81C 1/0038 (2013.01); B81B 3/0037 (2013.01); B81B 3/0043 (2013.01); G02B 26/0841 (2013.01); G02B 26/0866 (2013.01); B81B 2201/032 (2013.01); B81B 2201/047 (2013.01); B81B 2203/0172 (2013.01); B81B 2203/053 (2013.01);
Abstract

A method of post-processing an actuator element is presented. The method begins by receiving a fabricated actuator element including a metallic layer contacting a substrate, sacrificial layer proximate the metallic layer, and a first dielectric layer on the sacrificial layer. The metallic layer has an end proximal to and contacting at least part of the substrate and a distal end extending over the first dielectric layer. A second dielectric is deposited on a portion of the metallic layer at the distal end. And, the sacrificial layer is removed.


Find Patent Forward Citations

Loading…