The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 27, 2022
Filed:
Sep. 19, 2018
Applicant:
Seiko Epson Corporation, Tokyo, JP;
Inventors:
Koichi Morozumi, Shiojiri, JP;
Hiromu Miyazawa, Azumino, JP;
Hiroshi Kato, Okaya, JP;
Hiroshi Ito, Suwa, JP;
Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B41J 2/14 (2006.01); H01L 41/047 (2006.01); H01L 41/187 (2006.01); H01L 41/311 (2013.01); H01L 41/09 (2006.01); H01L 41/08 (2006.01); H01L 41/293 (2013.01); H01L 41/318 (2013.01); H01L 41/29 (2013.01);
U.S. Cl.
CPC ...
B41J 2/14233 (2013.01); H01L 41/0474 (2013.01); H01L 41/0478 (2013.01); H01L 41/0805 (2013.01); H01L 41/0973 (2013.01); H01L 41/1876 (2013.01); H01L 41/311 (2013.01); B41J 2202/03 (2013.01); H01L 41/29 (2013.01); H01L 41/293 (2013.01); H01L 41/318 (2013.01);
Abstract
A piezoelectric element including a piezoelectric layer having a perovskite structure including lead, zirconium, and titanium, and an electrode provided on the piezoelectric layer is provided. In the piezoelectric layer, in a range of 50 nm or smaller from an interface between the piezoelectric layer and the electrode in a thickness direction, a ratio c/a of a lattice spacing a in a direction perpendicular to the thickness direction and a lattice spacing c in the thickness direction satisfies 0.986≤c/a≤1.014.