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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11534790 B1

PDFFull Text
Date of Patent:
Dec. 27, 2022

Filed:

Nov. 08, 2017

Apparatus and method of manufacturing display apparatus

Applicant:

Samsung Display Co., Ltd., Yongin-si, KR;

Inventors:

Sangjin Han, Yongin-si, KR;

Eugene Kang, Yongin-si, KR;

Junha Park, Yongin-si, KR;

Mingyu Seo, Yongin-si, KR;

Youjong Lee, Yongin-si, KR;

Jongbun Han, Yongin-si, KR;

Euna Ko, Yongin-si, KR;

Sungjong Park, Yongin-si, KR;

Assignee:

Samsung Display Co., Ltd., Yongin-si, KR;

Attorney:

Lewis Roca Rothgerber Christie LLP

Primary Examiner:

Robert A Vetere

Int. Cl.
CPC ...
B05B 15/68 (2018.01); B05B 13/00 (2006.01); B05D 1/02 (2006.01); C23C 16/458 (2006.01); C23C 16/455 (2006.01); C23C 14/24 (2006.01); C23C 14/54 (2006.01); C23C 14/50 (2006.01); C23C 16/448 (2006.01); C23C 14/04 (2006.01); C23C 14/12 (2006.01); C23C 16/44 (2006.01); C23C 16/46 (2006.01); H01L 51/00 (2006.01);
U.S. Cl.
CPC ...
B05B 15/68 (2018.02); B05B 13/00 (2013.01); B05D 1/02 (2013.01); C23C 14/042 (2013.01); C23C 14/12 (2013.01); C23C 14/243 (2013.01); C23C 14/246 (2013.01); C23C 14/505 (2013.01); C23C 14/541 (2013.01); C23C 14/542 (2013.01); C23C 16/4401 (2013.01); C23C 16/4485 (2013.01); C23C 16/4486 (2013.01); C23C 16/4557 (2013.01); C23C 16/4584 (2013.01); C23C 16/45512 (2013.01); C23C 16/45517 (2013.01); C23C 16/45521 (2013.01); C23C 16/45565 (2013.01); C23C 16/45574 (2013.01); C23C 16/45591 (2013.01); C23C 16/46 (2013.01); H01L 51/001 (2013.01);
Abstract

An apparatus for manufacturing a display apparatus includes a deposition source, a nozzle head, a substrate fixer, and a deposition preventer. The deposition source is outside the chamber and vaporizes or sublimates a deposition material. The nozzle head is in the chamber, is connected to the at least one deposition source, and simultaneously sprays the deposition material onto an entire surface of a display substrate. The substrate fixer is connected to the chamber and moves linearly, with the display apparatus is mounted on the substrate fixer. The deposition preventer is in the chamber surrounding an edge portion of the nozzle head and an edge portion of the substrate fixer. The deposition preventer is heated during a deposition process.

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