The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 20, 2022

Filed:

Nov. 30, 2020
Applicant:

Seiko Epson Corporation, Tokyo, JP;

Inventor:

Nozomu Hirokubo, Shiojiri, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 7/14 (2006.01); H02N 1/00 (2006.01); G01J 3/02 (2006.01);
U.S. Cl.
CPC ...
H02N 1/006 (2013.01); G01B 7/14 (2013.01); G01J 3/0202 (2013.01);
Abstract

An actuator drive apparatus according to a first aspect includes a first member, a second member that faces the first member via a gap, a gap sensor that detects a dimension of the gap, a first actuator that changes the dimension of the gap through input of a first voltage signal, and a second actuator that changes the dimension of the gap through input of a second voltage signal, in which the first voltage signal is a voltage signal that becomes a constant bias voltage after a lapse of a predetermined time, and includes an overshoot signal larger than the bias voltage before the lapse of the predetermined time, and the second voltage signal is a voltage signal that is feedback-controlled so that a detection value detected by the gap sensor approaches a target value.


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