The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 20, 2022
Filed:
Jan. 03, 2020
Applicant:
Tdk Corporation, Tokyo, JP;
Inventor:
Junpei Morishita, Tokyo, JP;
Assignee:
TDK Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/18 (2006.01); H01L 41/187 (2006.01); H01L 41/08 (2006.01); H01L 41/09 (2006.01); H01L 41/113 (2006.01); C04B 35/26 (2006.01); C04B 35/475 (2006.01); C04B 35/622 (2006.01); B41J 2/14 (2006.01); H01L 41/047 (2006.01); G01C 19/5621 (2012.01); G01L 9/08 (2006.01); G01H 11/08 (2006.01); G11B 5/48 (2006.01);
U.S. Cl.
CPC ...
H01L 41/1878 (2013.01); B41J 2/14233 (2013.01); C04B 35/26 (2013.01); C04B 35/475 (2013.01); C04B 35/62218 (2013.01); H01L 41/0477 (2013.01); H01L 41/0815 (2013.01); H01L 41/0973 (2013.01); H01L 41/1132 (2013.01); B41J 2002/14266 (2013.01); C04B 2235/3236 (2013.01); C04B 2235/3274 (2013.01); C04B 2235/3298 (2013.01); C04B 2235/667 (2013.01); C04B 2235/95 (2013.01); G01C 19/5621 (2013.01); G01H 11/08 (2013.01); G01L 9/08 (2013.01); G11B 5/4873 (2013.01);
Abstract
A piezoelectric thin filmcontains a metal oxide, the metal oxide contains bismuth, potassium, titanium, iron and element M, the element M is at least one of magnesium and nickel, at least a part of the metal oxide is a crystal having a perovskite structure, and a () plane, a () plane or a () plane of the crystal is oriented in a normal direction dn of the surface of the piezoelectric thin film