The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 20, 2022

Filed:

Nov. 21, 2019
Applicant:

Seiko Epson Corporation, Tokyo, JP;

Inventors:

Chikara Kojima, Matsumoto, JP;

Koji Ohashi, Matsumoto, JP;

Hironori Suzuki, Chino, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/113 (2006.01); G01S 15/08 (2006.01); H01L 27/20 (2006.01); G01S 7/521 (2006.01);
U.S. Cl.
CPC ...
H01L 41/1132 (2013.01); G01S 7/521 (2013.01); G01S 15/08 (2013.01); H01L 27/20 (2013.01); H01L 41/1134 (2013.01);
Abstract

An ultrasonic sensor includes an element substrate having a first and a second surface at an opposite side of the first surface, including an opening section piercing through the element substrate in a Z direction from the first to second surface, a vibrating plate on the first surface of the element substrate to close the opening section, a plurality of vibration regions extending along an X direction orthogonal to the Z direction on the vibration plate in positions overlapping the opening section, and a plurality of piezoelectric elements to correspond to the plurality of vibration regions of the vibration plate. The opening section includes, on the first surface, a first and second side parallel to the X direction and a third and fourth side coupling end portions in the X direction of the first and second sides at an acute or obtuse angle to the first and the second side.


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