The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 20, 2022

Filed:

Feb. 03, 2020
Applicant:

Samsung Electronics Co., Ltd., Suwon-si, KR;

Inventors:

Woojin Lee, Suwon-si, KR;

Kiyoung Lee, Seoul, KR;

Yongsung Kim, Suwon-si, KR;

Eunsun Kim, Suwon-si, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/51 (2006.01); C01G 23/00 (2006.01); H01L 27/11585 (2017.01); H01L 27/11502 (2017.01); C01G 35/00 (2006.01);
U.S. Cl.
CPC ...
H01L 29/516 (2013.01); C01G 23/006 (2013.01); C01G 35/006 (2013.01); H01L 27/11502 (2013.01); H01L 27/11585 (2013.01); C01P 2002/34 (2013.01); C01P 2002/52 (2013.01); C01P 2002/77 (2013.01); C01P 2006/40 (2013.01);
Abstract

A thin film structure including a dielectric material layer and an electronic device to which the thin film structure is applied are provided. The dielectric material layer includes a compound expressed by ABO, wherein at least one of A and B in ABOis substituted and doped with another atom having a larger atom radius, and ABObecomes AA'BB′O(where x>=0, y>=0, at least one of x and y≠0, a dopant A′ has an atom radius greater than A and/or a dopant B′ has an atom radius greater than B) through substitution and doping. A dielectric material property of the dielectric material layer varies according to a type of a substituted and doped dopant and a substitution doping concentration.


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