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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11532476 B1

PDFFull Text
Date of Patent:
Dec. 20, 2022

Filed:

Apr. 20, 2021

Laser crystallizing apparatus

Applicant:

Samsung Display Co., Ltd., Yongin-si, KR;

Inventors:

Akifumi Sangu, Hwaseong-si, KR;

Gyoowan Han, Yongin-si, KR;

Jekil Ryu, Yongin-si, KR;

Kyungjae Lee, Seoul, KR;

Assignee:

SAMSUNG DISPLAY CO., LTD., Yongin-si, KR;

Attorney:

F. Chau & Associates, LLC

Primary Examiner:

Errol V Fernandes

Int. Cl.
CPC ...
H01L 21/02 (2006.01); G02B 27/28 (2006.01); G01J 1/42 (2006.01); G02B 27/10 (2006.01); B23K 26/064 (2014.01); H01L 27/12 (2006.01); B23K 26/067 (2006.01); H01L 21/67 (2006.01); B23K 26/03 (2006.01); B23K 26/08 (2014.01); B23K 26/70 (2014.01); B23K 26/352 (2014.01); B23K 26/06 (2014.01); B23K 26/354 (2014.01); B23K 26/00 (2014.01); B23K 101/40 (2006.01); B23K 103/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02678 (2013.01); B23K 26/0006 (2013.01); B23K 26/032 (2013.01); B23K 26/064 (2015.10); B23K 26/067 (2013.01); B23K 26/0608 (2013.01); B23K 26/0652 (2013.01); B23K 26/0853 (2013.01); B23K 26/352 (2015.10); B23K 26/354 (2015.10); B23K 26/705 (2015.10); G01J 1/4257 (2013.01); G02B 27/106 (2013.01); G02B 27/108 (2013.01); G02B 27/283 (2013.01); G02B 27/286 (2013.01); H01L 21/02532 (2013.01); H01L 21/02592 (2013.01); H01L 21/67115 (2013.01); H01L 27/1222 (2013.01); H01L 27/1285 (2013.01); B23K 2101/40 (2018.08); B23K 2103/50 (2018.08);
Abstract

A laser crystallizing apparatus includes a first light source unit configured to emit a first input light having a linearly polarized laser beam shape. A second light source unit is configured to emit a second input light having a linearly polarized laser beam shape. A polarization optical system is configured to rotate the first input light and/or the second input light at a predetermined rotation angle. An optical system is configured to convert the first input light and the second input light, which pass through the polarization optical system, into an output light. A target substrate is seated on a stage and output light is directed onto the target substrate. A monitoring unit is configured to receive the first input light or the second input light from the polarization optical system and measure a laser beam quality thereof.

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