The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 20, 2022
Filed:
Jul. 20, 2020
Applied Materials, Inc., Santa Clara, CA (US);
Chien-Min Liao, San Jose, CA (US);
Yao-Hung Yang, Santa Clara, CA (US);
Tom K. Cho, Los Altos, CA (US);
Siamak Salimian, Los Altos, CA (US);
Hsiu Yang, Santa Clara, CA (US);
Chun-Chung Chen, San Jose, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Certain embodiments provide a method and non-transitory computer readable medium having instructions that, when executed by a processor of a processing system, cause the processing system to perform a method for improving operation of a semiconductor processing system. The method of part life estimation generally includes obtaining a chamber part having a first surface portion and second surface portion. A data matrix in the first portion of the chamber part is read. The data matrix has raised features. The first portion of the chamber part is cleaned. Wear on the raised features is evaluated. The part is discarded in response to the wear on the raised feature.