The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 20, 2022

Filed:

Mar. 02, 2021
Applicant:

Kabushiki Kaisha Toshiba, Tokyo, JP;

Inventors:

Kei Masunishi, Kawasaki Kanagawa, JP;

Yasushi Tomizawa, Tokyo, JP;

Etsuji Ogawa, Kawasaki Kanagawa, JP;

Ryunosuke Gando, Yokohama Kanagawa, JP;

Shiori Kaji, Kawasaki Kanagawa, JP;

Hiroki Hiraga, Saitama Saitama, JP;

Fumito Miyazaki, Yokohama Kanagawa, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01P 15/097 (2006.01); B81B 3/00 (2006.01); G01P 15/125 (2006.01);
U.S. Cl.
CPC ...
G01P 15/097 (2013.01); B81B 3/0021 (2013.01); B81B 3/0045 (2013.01); G01P 15/125 (2013.01); B81B 2201/0235 (2013.01); B81B 2203/0118 (2013.01);
Abstract

According to one embodiment, a sensor includes a base body, a first supporter fixed to the base body, and a first movable part separated from the base body. The first movable part includes a first movable base part supported by the first supporter, a second movable base part connected with the first movable base part, and a first movable beam. The first movable beam includes a first beam, a first movable conductive part, and a first connection region. The first beam includes a first beam portion, a second beam portion, and a third beam portion between the first beam portion and the second beam portion. The first beam portion is connected with the first movable base part. The second beam portion is connected with the second movable base part. The first connection region connects the third beam portion and the first movable conductive part.


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