The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 20, 2022
Filed:
Dec. 17, 2018
Applicant:
Seiko Epson Corporation, Tokyo, JP;
Inventors:
Chikara Kojima, Matsumoto, JP;
Hironori Suzuki, Chino, JP;
Eiji Osawa, Chino, JP;
Koji Ohashi, Matsumoto, JP;
Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B06B 1/06 (2006.01); B06B 1/02 (2006.01); H01L 41/04 (2006.01); H01L 41/08 (2006.01); H01L 41/312 (2013.01); H01L 41/331 (2013.01); H01L 41/332 (2013.01); A61B 8/00 (2006.01); G10K 9/125 (2006.01);
U.S. Cl.
CPC ...
B06B 1/0622 (2013.01); A61B 8/4488 (2013.01); B06B 1/0207 (2013.01); G10K 9/125 (2013.01); H01L 41/042 (2013.01); H01L 41/081 (2013.01); H01L 41/312 (2013.01); H01L 41/331 (2013.01); H01L 41/332 (2013.01);
Abstract
A piezoelectric film includes a substrate having flexibility, and at least two piezoelectric elements provided to the substrate so as to be arranged at intervals of a first dimension along a first direction, the piezoelectric elements are each configured by stacking a first electrode film, a piezoelectric film made of an inorganic material, and a second electrode film along a thickness direction of the substrate, and an area between the piezoelectric elements adjacent to each other along the first direction forms a vibrational region which can be displaced in the thickness direction.