The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 20, 2022
Filed:
Jul. 01, 2021
Applied Materials, Inc., Santa Clara, CA (US);
Vishwas Kumar Pandey, Madhya Pradesh, IN;
Lara Hawrylchak, Gilroy, CA (US);
Eric Kihara Shono, San Mateo, CA (US);
Kartik Shah, Saratoga, CA (US);
Christopher S. Olsen, Fremont, CA (US);
Sairaju Tallavarjula, Santa Clara, CA (US);
Kailash Pradhan, Campbell, CA (US);
Rene George, San Carlos, CA (US);
Johanes F. Swenberg, Los Gatos, CA (US);
Stephen Moffatt, St. Brelade, JE;
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Abstract
Gas injectors for providing uniform flow of fluid are provided herein. The gas injector includes a plenum body. The plenum body includes a recess, a protrusion adjacent to the recess and extending laterally away from the plenum body, and a plurality of nozzles extending laterally from an exterior surface of the plenum body. The plenum body has a plurality of holes in an exterior wall of the plenum body. Each nozzle is in fluid communication with an interior volume of the plenum body. By directing the flow of fluid, the gas injector provides for a uniform deposition.