The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 13, 2022
Filed:
Aug. 08, 2018
Applicants:
National University Corporation Shizuoka University, Shizuoka, JP;
Saginomiya Seisakusho, Inc., Tokyo, JP;
Inventors:
Gen Hashiguchi, Hamamatsu, JP;
Hideaki Koga, Sayama, JP;
Assignees:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H02N 1/08 (2006.01); B81B 3/00 (2006.01); B81C 1/00 (2006.01);
U.S. Cl.
CPC ...
H02N 1/08 (2013.01); B81B 3/0037 (2013.01); B81C 1/00166 (2013.01); B81B 2203/0136 (2013.01); B81B 2203/04 (2013.01); B81C 2201/0132 (2013.01);
Abstract
A method of manufacturing a MEMS vibration element having a fixed electrode, a movable electrode, and an elastic supporting unit that elastically supports the movable electrode with respect to the fixed electrode includes: etching a base material having a first thickness to form the fixed electrode and the movable electrode; and etching the base material to form the elastic supporting unit having a second thickness, the second thickness being less than the first thickness.