The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 13, 2022
Filed:
Jul. 05, 2018
Applicant:
Advanced Material Technologies, Inc., Chiba, JP;
Inventors:
Assignee:
KRYSTAL INC., Yamaguchi, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/187 (2006.01); H01L 41/047 (2006.01); H01L 41/297 (2013.01); H01L 41/314 (2013.01); H01L 41/083 (2006.01); H01L 41/316 (2013.01); H01L 41/318 (2013.01); H01L 41/08 (2006.01);
U.S. Cl.
CPC ...
H01L 41/1876 (2013.01); H01L 41/0471 (2013.01); H01L 41/0477 (2013.01); H01L 41/0478 (2013.01); H01L 41/083 (2013.01); H01L 41/0815 (2013.01); H01L 41/297 (2013.01); H01L 41/314 (2013.01); H01L 41/316 (2013.01); H01L 41/318 (2013.01);
Abstract
A film structure body has: a substrate that is a silicon substrate including an upper surface composed of a (100) plane; an orientation film including a zirconium oxide film that is cubic crystal (100)-oriented on the upper surface; and a conductive film including a platinum film that is cubic crystal (100)-oriented on the orientation film.