The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 13, 2022

Filed:

Nov. 01, 2017
Applicant:

Korea Institute of Science and Technology, Seoul, KR;

Inventors:

Doh Kwon Lee, Seoul, KR;

In Ho Kim, Seoul, KR;

Won Mok Kim, Seoul, KR;

Jong Keuk Park, Seoul, KR;

Taek Sung Lee, Seoul, KR;

Doo Seok Jeong, Seoul, KR;

Hyeon Seung Lee, Seoul, KR;

Jeung Hyun Jeong, Seoul, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B82Y 40/00 (2011.01); H01L 31/18 (2006.01); H01L 31/054 (2014.01); B81C 1/00 (2006.01); H01L 31/0236 (2006.01);
U.S. Cl.
CPC ...
H01L 31/1892 (2013.01); B81C 1/00539 (2013.01); H01L 31/02366 (2013.01); H01L 31/0547 (2014.12); B81C 2201/0133 (2013.01); B82Y 40/00 (2013.01);
Abstract

An embodiment includes a method of texturing a semiconductor substrate, a semiconductor substrate manufactured using the method, and a solar cell including the semiconductor substrate, the method including: forming metal nanoparticles on a semiconductor substrate, primarily etching the semiconductor substrate, removing the metal nanoparticles, and secondarily etching the primarily etched semiconductor substrate to form nanostructures.


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