The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 13, 2022
Filed:
Jun. 13, 2019
Applicant:
Samsung Electronics Co., Ltd., Suwon-si, KR;
Inventor:
Hyun Ho Choi, Yongin-si, KR;
Assignee:
Samsung Electronics Co., Ltd., Gyeonggi-do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); C23C 16/455 (2006.01); C23C 16/44 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67757 (2013.01); C23C 16/4409 (2013.01); C23C 16/4412 (2013.01); C23C 16/45544 (2013.01); C23C 16/45578 (2013.01); H01L 21/0262 (2013.01);
Abstract
A semiconductor processing apparatus may include a processing part including a cavity, an insertion part configured to be inserted in the cavity, and a gas inlet coupled to the processing part and configured to supply a gas into the cavity. The insertion part may include a container and a gas ejection pipe facing the container.