The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 13, 2022
Filed:
Jul. 25, 2019
Applicant:
Kionix, Inc., Ithaca, NY (US);
Inventors:
Scott A. Miller, Ithaca, NY (US);
Nicole Kerness, Ithaca, NY (US);
Randy Phillips, Ithaca, NY (US);
Sangtae Park, Ithaca, NY (US);
Martin Heller, Kyoto, JP;
Mizuho Okada, Ithaca, NY (US);
Andrew Hocking, Ithaca, NY (US);
Wenting Gu, Ithaca, NY (US);
Assignee:
Kionix, Inc., Ithaca, NY (US);
Primary Examiner:
Int. Cl.
CPC ...
B81B 3/00 (2006.01); H01H 59/00 (2006.01);
U.S. Cl.
CPC ...
H01H 59/0009 (2013.01); B81B 3/0067 (2013.01); B81B 2201/012 (2013.01); B81B 2203/019 (2013.01); B81B 2203/0315 (2013.01);
Abstract
A micro-electromechanical system (MEMS) device includes a substrate and a beam suspended relative to a surface of the substrate. The substrate includes a buried insulator layer and a cavity. The beam includes a first portion and a second portion that are separated by an isolation joint. The cavity separates the surface of the substrate from the beam.