The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 13, 2022
Filed:
Sep. 04, 2019
Applicant:
Kioxia Corporation, Tokyo, JP;
Inventors:
Yuki Watanabe, Yokohama Kanagawa, JP;
Taiki Kimura, Kawasaki Kanagawa, JP;
Kazufumi Shiozawa, Yokohama Kanagawa, JP;
Kouichi Nakayama, Hiratsuka Kanagawa, JP;
Assignee:
KIOXIA CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06T 7/00 (2017.01); G03F 1/38 (2012.01); G03F 7/20 (2006.01); G03F 1/36 (2012.01); G06F 30/398 (2020.01);
U.S. Cl.
CPC ...
G06T 7/0004 (2013.01); G03F 1/36 (2013.01); G03F 1/38 (2013.01); G03F 7/70441 (2013.01); G06F 30/398 (2020.01);
Abstract
According to one embodiment, a method for displaying an index value in generation of a mask pattern verification model includes: calculating a first index value using a plurality of images; estimating a model on the basis of the first index value and pattern information; calculating a second index value using the model; and displaying at least one of the first index value and the second index value.