The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 13, 2022

Filed:

Oct. 28, 2019
Applicant:

General Electric Company, Schenectady, NY (US);

Inventors:

Marco Francesco Aimi, Niskayuna, NY (US);

Joseph Alfred Iannotti, Glenville, NY (US);

Assignee:

General Electric Company, Schenectady, NY (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 17/02 (2006.01); H03H 9/25 (2006.01); H03H 9/02 (2006.01);
U.S. Cl.
CPC ...
G01B 17/02 (2013.01); H03H 9/02551 (2013.01); H03H 9/02866 (2013.01); H03H 9/25 (2013.01);
Abstract

A measuring system is disclosed. The measuring system includes a surface acoustic wave (SAW) device including a piezoelectric substrate and a first and second electrode disposed on a surface of the piezoelectric substrate, and a measuring device communicatively coupled to the first electrode via a first probe and the second electrode via a second probe and configured to apply an electrical signal to the first and second electrode to generate an incident bulk acoustic wave within the piezoelectric substrate, detect at least a first reflected bulk acoustic wave and a second reflected bulk acoustic wave at the first and second electrode, and calculate a thickness between a first interface corresponding to the first reflected bulk acoustic wave and a second interface corresponding to the second reflected bulk acoustic wave based on a time elapsed between detecting the first and second reflected bulk acoustic waves.


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