The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 13, 2022
Filed:
Jan. 18, 2021
Infineon Technologies Ag, Neubiberg, DE;
Wolfgang Klein, Zorneding, DE;
Evangelos Angelopoulos, Munich, DE;
Stefan Barzen, Munich, DE;
Marc Fueldner, Neubiberg, DE;
Stefan Geissler, Regensburg, DE;
Matthias Friedrich Herrmann, Munich, DE;
Ulrich Krumbein, Rosenheim, DE;
Konstantin Tkachuk, Unterhaching, DE;
Giordano Tosolini, Munich, DE;
Juergen Wagner, Nittendorf, DE;
Infineon Technologies AG, Neubiberg, DE;
Abstract
A microfabricated structure includes a perforated stator; a first isolation layer on a first surface of the perforated stator; a second isolation layer on a second surface of the perforated stator; a first membrane on the first isolation layer; a second membrane on the second isolation layer; and a pillar coupled between the first membrane and the second membrane, wherein the first isolation layer includes a first tapered edge portion having a common surface with the first membrane, wherein the second isolation layer includes a first tapered edge portion having a common surface with the second membrane, and wherein an endpoint of the first tapered edge portion of the first isolation layer is laterally offset with respect to an endpoint of the first tapered edge portion of the second isolation layer.