The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 13, 2022
Filed:
Aug. 28, 2017
Applicant:
Industry-university Cooperation Foundation Hanyang University Erica Campus, Ansan-Si, KR;
Inventors:
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/16 (2006.01); C23C 14/34 (2006.01); C23C 14/58 (2006.01); B01J 20/02 (2006.01); B01J 20/32 (2006.01); B01D 53/02 (2006.01); C01B 3/00 (2006.01); B81B 7/00 (2006.01); H01L 23/26 (2006.01);
U.S. Cl.
CPC ...
B01J 20/0225 (2013.01); B01D 53/02 (2013.01); B01J 20/0211 (2013.01); B01J 20/3204 (2013.01); B01J 20/3236 (2013.01); C01B 3/0005 (2013.01); C23C 14/165 (2013.01); C23C 14/3464 (2013.01); C23C 14/5806 (2013.01); B01D 2257/108 (2013.01); B81B 7/0038 (2013.01); H01L 23/26 (2013.01);
Abstract
A thin film getter is provided. The thin film getter comprises a substrate and an absorption layer on the substrate, wherein the absorption layer comprises a getter material for absorbing target gas and an auxiliary material for providing a moving path of the target gas, and the getter material can be divided into a plurality of getter regions by the auxiliary material.