Nxm terahertz detector array imaging system based on a schottky contact rasterization structure

Abstract

The present disclosure discloses an N×M terahertz detector array imaging system based on a Schottky contact rasterization structure. The rasterization is introduced into the Schottky barrier diode, so that the rasterized Schottky contact resonates with the terahertz waves, the plasma resonance effect is enhanced, and the detection sensitivity of the array unit can be further improved. Moreover, there is no need to use an antenna, which can effectively avoid the problems such as large loss of the on-chip antenna, low gain efficiency, and difficulty in verifying through DRC design rules; and the chip area is greatly reduced, which greatly reduces the production cost. Finally, by adjusting the rasterization structure parameters of the array detector unit during the design process, the detector array can realize monochromatic array imaging or multicolor array imaging, which provides a new solution for the realization of low-cost, high-performance terahertz array cameras and terahertz imagers.