The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 06, 2022
Filed:
Jan. 09, 2020
Christopher F. Kirby, Gambrills, MD (US);
Michael Rennie, Ashland, VA (US);
Daniel J. O'donnell, Linthicum, MD (US);
Aurelius L. Graninger, Sykesville, MD (US);
Aaron A. Pesetski, Gambrills, MD (US);
Christopher F. Kirby, Gambrills, MD (US);
Michael Rennie, Ashland, VA (US);
Daniel J. O'Donnell, Linthicum, MD (US);
Aurelius L. Graninger, Sykesville, MD (US);
Aaron A. Pesetski, Gambrills, MD (US);
NORTHROP GRUMMAN SYSTEMS CORPORATION, Falls Church, VA (US);
Abstract
A method of forming a superconductor structure is disclosed. The method comprises forming a superconductor line in a first dielectric layer, forming a resistor with an end coupled to an end of the superconductor line, and forming a second dielectric layer overlying the resistor. The method further comprises etching a tapered opening through the second dielectric layer to the resistor, and performing a contact material fill with a normal metal material to fill the tapered opening and form a normal metal connector coupled to the resistor.