The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 06, 2022
Filed:
Dec. 07, 2020
Canon Kabushiki Kaisha, Tokyo, JP;
Shinichi Shudo, Saitama, JP;
CANON KABUSHIKI KAISHA, Tokyo, JP;
Abstract
An imprint apparatus that performs a supply step of supplying an imprint material onto each of shot regions adjacent to each other on a substrate and, after the supply step, execute an imprint process including a contact step, a curing step, and a mold releasing step for each of the shot regions. The apparatus comprises an irradiator that irradiates the imprint material on the shot region with light in the curing step, and a light-shielding member that defines an irradiation region of the light from the irradiator, wherein the light-shielding member defines the irradiation region such that the imprint material in an end portion of a first shot region on a side of a second shot region adjacent to the first shot region is complementarily cured by light irradiation in the curing step performed on the second shot region.