The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 06, 2022
Filed:
Jun. 14, 2018
Applicant:
Robert Bosch Gmbh, Stuttgart, DE;
Inventors:
Arne Dannenberg, Metzingen, DE;
Stephan Oppl, Pfullingen, DE;
Assignee:
Robert Bosch GmbH, Stuttgart, DE;
Primary Examiner:
Int. Cl.
CPC ...
B81C 1/00 (2006.01); G01L 13/02 (2006.01); B81B 7/00 (2006.01);
U.S. Cl.
CPC ...
G01L 13/025 (2013.01); B81B 7/0048 (2013.01); B81C 1/00325 (2013.01); B81B 2201/0264 (2013.01); B81B 2203/0127 (2013.01); B81B 2203/0163 (2013.01); B81B 2203/033 (2013.01); B81B 2203/0315 (2013.01); B81B 2203/0338 (2013.01); B81C 2203/0136 (2013.01);
Abstract
A method for manufacturing a micromechanical sensor, in particular a pressure difference sensor, including creating a functional layer on a substrate; creating at least one rear side trench area proceeding from a rear side of a substrate, for exposing the functional layer for a sensor diaphragm; creating at least one front side trench area for forming at least one supporting structure, in particular an energy storage structure, preferably in the form of a spring structure, in the substrate as a mounting for the sensor diaphragm; and at least partially filling at least a front side trench area with a gel.