The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 06, 2022

Filed:

Jul. 06, 2020
Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

David Alexander Britz, San Jose, CA (US);

Lance A. Scudder, Sunnyvale, CA (US);

Yuriy Melnik, San Jose, CA (US);

Sukti Chatterjee, San Jose, CA (US);

Assignee:

APPLIED MATERIALS, INC., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/34 (2006.01); C23C 16/455 (2006.01); C23C 28/04 (2006.01); C23C 16/40 (2006.01); C23C 16/50 (2006.01);
U.S. Cl.
CPC ...
C23C 16/342 (2013.01); C23C 16/403 (2013.01); C23C 16/45536 (2013.01); C23C 16/50 (2013.01); C23C 28/042 (2013.01);
Abstract

Embodiments of the present disclosure generally relate to protective coatings on various substrates including aerospace components and methods for depositing the protective coatings. In one or more embodiments, a method of forming a protective coating on an aerospace component includes forming an aluminum oxide layer on a surface of the aerospace component and depositing a boron nitride layer on or over the aluminum oxide layer during a vapor deposition process. In some examples, the method includes depositing a metal-containing catalytic layer on the aluminum oxide layer before depositing the boron nitride layer. The boron nitride layer can include hexagonal boron nitride (hBN).


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