The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 06, 2022
Filed:
Feb. 12, 2018
Applicant:
Edwards, S.r.o., Lutin, CZ;
Inventors:
Martin Zahradka, Lutin, CZ;
Miroslav Strasil, Lutin, CZ;
Assignee:
Edwards, S.R.O., Lutin, CZ;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B08B 7/00 (2006.01); B08B 5/00 (2006.01); F04C 25/02 (2006.01); F04C 29/00 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
B08B 7/0035 (2013.01); B08B 5/00 (2013.01); F04C 25/02 (2013.01); F04C 29/0092 (2013.01); H01J 37/32816 (2013.01); H01J 37/32853 (2013.01); B08B 2205/00 (2013.01); H01J 2237/002 (2013.01); H01J 2237/335 (2013.01);
Abstract
The present invention provides a method for cleaning a component for use in an ultra-high vacuum. The method may comprise the steps of placing the component to be cleaned in a vacuum furnace chamber; plasma cleaning the component at a temperature of greater than about 80° C.; and evacuating the chamber to a pressure of less than about 10E-5 mbar. Apparatus for performing such methods and kits comprising said components are also provided.