The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 06, 2022
Filed:
Dec. 31, 2020
Applicant:
J-solution Co., Ltd., Yongin-si, KR;
Inventor:
Seungyong Lee, Hwaseong-si, KR;
Assignee:
J-SOLUTION CO., LTD., Yongin-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01D 8/00 (2006.01); B01D 53/00 (2006.01); B01D 53/34 (2006.01); B01D 53/75 (2006.01); B01D 53/81 (2006.01);
U.S. Cl.
CPC ...
B01D 53/005 (2013.01); B01D 8/00 (2013.01); B01D 53/346 (2013.01); B01D 53/75 (2013.01); B01D 53/81 (2013.01); B01D 2257/10 (2013.01); B01D 2258/0216 (2013.01);
Abstract
Disclosed is a gas collection apparatus used in manufacturing a semiconductor. The apparatus includes: a housing having a chamber formed therein; a heating member installed in the housing to heat cobalt-carbon gas introduced into the chamber; a cobalt deposition member installed across the chamber of the housing to deposit cobalt composite; and a cooling member that induces carbon composite to be solidified and deposited while rapidly cooling the carbon composite.