The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 29, 2022
Filed:
Feb. 21, 2019
Applicant:
Invensense, Inc., San Jose, CA (US);
Inventors:
Nikhil Apte, Palo Alto, CA (US);
Chienliu Chang, Los Altos, CA (US);
Shreyas Thakar, San Jose, CA (US);
Mei-Lin Chan, Milpitas, CA (US);
Assignee:
INVENSENSE, INC., San Jose, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/047 (2006.01); H01L 41/09 (2006.01); B06B 1/06 (2006.01); B81B 7/00 (2006.01); G01N 29/24 (2006.01); B81B 3/00 (2006.01);
U.S. Cl.
CPC ...
H01L 41/0926 (2013.01); B06B 1/0622 (2013.01); B06B 1/0688 (2013.01); B81B 3/0021 (2013.01); B81B 7/0064 (2013.01); G01N 29/2437 (2013.01); H01L 41/047 (2013.01);
Abstract
A piezoelectric micromachined ultrasound transducer (PMUT) array may comprise PMUT devices with respective piezoelectric layers and electrode layers. Parasitic capacitance can be reduced when an electrode layer is not shared across PMUT devices but may expose the devices to electromagnetic interference (EMI). A conductive layer located within the structural layer or on a shared plane with the electrode layers may reduce EMI affecting the PMUT array operation.