The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 29, 2022
Filed:
Jun. 25, 2020
Applicant:
Flosfia Inc., Kyoto, JP;
Inventor:
Isao Takahashi, Kyoto, JP;
Assignee:
FLOSFIA INC., Kyoto, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 21/465 (2006.01); H01L 29/24 (2006.01);
U.S. Cl.
CPC ...
H01L 21/465 (2013.01); H01L 29/24 (2013.01);
Abstract
In a first aspect of a present inventive subject matter, a method of etching an object to be etched with an etching liquid that contains bromine, and the object contains at least gallium and/or aluminum.