The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 29, 2022
Filed:
May. 11, 2021
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/34 (2006.01); C23C 14/34 (2006.01); C23C 14/35 (2006.01); C22C 9/04 (2006.01); C22C 9/06 (2006.01); B23K 15/00 (2006.01); B23K 1/20 (2006.01); B23K 1/00 (2006.01); B23K 1/19 (2006.01); C23C 14/54 (2006.01); B23K 103/12 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3497 (2013.01); B23K 1/0008 (2013.01); B23K 1/19 (2013.01); B23K 1/20 (2013.01); B23K 15/006 (2013.01); B23K 15/0053 (2013.01); B23K 15/0086 (2013.01); C22C 9/04 (2013.01); C22C 9/06 (2013.01); C23C 14/3407 (2013.01); C23C 14/35 (2013.01); C23C 14/54 (2013.01); C23C 14/541 (2013.01); H01J 37/3405 (2013.01); H01J 37/3435 (2013.01); B23K 2103/12 (2018.08);
Abstract
Physical vapor deposition target assemblies and methods of manufacturing such target assemblies are disclosed. An exemplary target assembly comprises a flow pattern including a plurality of arcs and bends fluidly connected to an inlet end and an outlet end.