The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 29, 2022

Filed:

May. 20, 2019
Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventor:

Tomohiro Sugimoto, Yoshikawa, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01J 9/00 (2006.01); G02B 26/12 (2006.01); G02B 13/16 (2006.01); G02B 5/18 (2006.01); G02B 3/00 (2006.01); G01M 11/02 (2006.01);
U.S. Cl.
CPC ...
G02B 26/123 (2013.01); G01J 9/00 (2013.01); G02B 3/0056 (2013.01); G02B 5/1885 (2013.01); G02B 13/16 (2013.01); G01J 2009/002 (2013.01); G01M 11/0292 (2013.01);
Abstract

A wavefront sensor includes a splitting element configured to split an incident light beam into a plurality of light beams, an image sensor configured to receive the plurality of light beams, and a processing unit configured to calculate a wavefront of the incident light beam based on an intensity distribution of the plurality of light beams received by the image sensor. The splitting element is either in direct contact with the image sensor or in contact with the image sensor via a plate glass. In the calculation of the wavefront, the processing unit corrects a relative positional deviation between the splitting element and the image sensor by calculating a rotation about a rotation axis.


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