The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 29, 2022

Filed:

Sep. 15, 2021
Applicant:

Kioxia Corporation, Tokyo, JP;

Inventor:

Takeshi Yamane, Tsukuba Ibaraki, JP;

Assignee:

Kioxia Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01T 1/16 (2006.01);
U.S. Cl.
CPC ...
G01T 1/1606 (2013.01);
Abstract

A particle detection device of an embodiment includes: a detector including a plurality of superconducting strips, and detecting a particle generated from a particle generation source; a conversion mechanism including a plurality of channels provided for the respective superconducting strips, and converting an analog signal from a corresponding one of the superconducting strips into a digital signal; an aggregation mechanism including a circuit which receives an output from the conversion mechanism; a first temperature maintaining portion maintaining a first temperature equal to or lower than a superconducting transition temperature; a first low-temperature container housing the first temperature maintaining portion; and a vacuum container housing the conversion mechanism and the first low-temperature container, and including an opening, the detector being housed in the first low-temperature container, and being connected to the first temperature maintaining portion, and the conversion mechanism being maintained at a temperature not lower than the first temperature.


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