The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 29, 2022

Filed:

Aug. 30, 2017
Applicant:

Ecole Polytechnique Federale DE Lausanne, Lausanne, CH;

Inventors:

Niels Quack, Yverdon, CH;

Adrien Toros, Le Mont sur Lausanne, CH;

Marcell Kiss, Chavannes-Renens, CH;

Teodoro Graziosi, Renens, CH;

Pascal Gallo, Yens, CH;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 29/66 (2006.01); B81C 1/00 (2006.01); C30B 29/04 (2006.01); C30B 33/12 (2006.01);
U.S. Cl.
CPC ...
C30B 29/66 (2013.01); B81C 1/00396 (2013.01); B81C 1/00476 (2013.01); B81C 1/00531 (2013.01); B81C 1/00539 (2013.01); C30B 29/04 (2013.01); C30B 33/12 (2013.01); B81C 2201/0132 (2013.01);
Abstract

The present invention relates to a free-standing single crystalline diamond part and a single crystalline diamond part production method. The method includes the steps of: —providing a single crystalline diamond substrate or layer; —providing a first adhesion layer on the substrate or layer; —providing a second adhesion layer on the first adhesion layer: —providing a mask layer on the second adhesion layer; —forming at least one indentation or a plurality of indentations through the mask layer and the first and second adhesion layers to expose a portion or portions of the single crystalline diamond substrate or layer; and—etching the exposed portion or portions of the single crystalline diamond substrate or layer and etching entirely through the single crystalline diamond substrate or layer.


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